kazushige sato

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 1:30 PM - 4:15 PM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19p-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:00 PM - 2:15 PM

[19p-Z24-3] Si Three-Dimensional Structure Annealing In a Hydrogen Atmosphere Using a Minimal Laser Heating Tool

〇kazushige sato^1,4, Takashi Chiba^1,4, Masao Terada^1,4, Kengo Hamada^1,4, Yoshiyuki Nakayama³, Yoshiaki Kanamori³, Hiroyuki Tanaka², Masashi Kase², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST, 3.Tohoku Univ., 4.Sakaguchi E.H VOC Corp.)

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