Fumito Imura

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 1:30 PM - 4:15 PM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19p-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:15 PM - 2:30 PM

[19p-Z24-4] Conformal Cu Electroplating on Laser-Vias

〇Fumito Imura¹, Takafumi Yoshinaga², Kayo Kamasaki², Toshihiro Kikuno², Michihiro Inoue¹, Sommawan Khumpuang^1,3, Shiro Hara^1,3 (1.AIST, 2.Kumamotobosei, 3.MINIMAL)

3:00 PM - 3:15 PM

[19p-Z24-6] Laser-Via Interconnection for Half-Inch Sized Multi-Chip Packaging (II)

〇Fumito Imura¹, Shuhei Nakamichi², Michihiro Inoue¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

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