Hiroshige Kogayu

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 1:30 PM - 4:15 PM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19p-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:30 PM - 2:45 PM

[19p-Z24-5] Study of Piezo-resistive Accelerometer using Full Minimal Fab

〇Hiroshige Kogayu¹, Hiroyuki Tanaka^1,2, Fumito Imura^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST)