Mickael Lozach

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 1:30 PM - 4:15 PM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19p-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:45 PM - 4:00 PM

▲ [19p-Z24-9] Is the Si-O Stretching Mode from Gate Oxide in MOS Structure related to the Density of
Interface States?

〇Mickael Lozach¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.Minimal Fab Promoting Organization, 2.National Institute of Advanced Science and Technology (AIST))