The 68th JSAP Spring Meeting 2021

Hiroshi Inokawa

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Chairperson, etc.

Tue. Mar 16, 2021 9:00 AM - 12:00 PM Z26 (Z26)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[16a-Z26-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Hiroshi Inokawa(Shizuoka Univ.), Takahiro Mori(AIST)