The 68th JSAP Spring Meeting 2021

Hisataka Hayashi

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Chairperson, etc.

Wed. Mar 17, 2021 9:00 AM - 11:45 AM Z03 (Z03)

  • Oral presentation
  • | 8 Plasma Electronics
  • | 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17a-Z03-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Hisataka Hayashi(KIOXIA), Tomoko Ito(阪大)