The 68th JSAP Spring Meeting 2021

Kimihiko Kato

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Chairperson, etc.

Wed. Mar 17, 2021 1:30 PM - 6:00 PM Z26 (Z26)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[17p-Z26-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Kazuhiko Endo(AIST), Kimihiko Kato(AIST)