Toshihide Tsuru

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Chairperson, etc.

Thu. Mar 18, 2021 1:15 PM - 2:15 PM Z14 (Z14)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[18p-Z14-1~4] 7.1 X-ray technologies

Toshihide Tsuru(Yamagata Univ.)

Thu. Mar 18, 2021 2:30 PM - 6:35 PM Z03 (Z03)

Symposium (Oral)
| Symposium
| Progresses and future on EUV and soft x-ray imaging techniques

[18p-Z03-1~10] Progresses and future on EUV and soft x-ray imaging techniques

Mitsunori Toyoda(Tokyo Polytechnic Univ.), Toshihide Tsuru(Yamagata Univ.), Tetsuo Harada(Univ. of Hyogo), Ohigashi Takuji(IMS)