[16a-Z13-1~12] 13.3 Insulator technology

[16a-Z13-11] Anodic SiO₂ film fabricated in high pressure steam - Applied voltage dependence -

〇Takumi Katata¹, Takuma Yatsuhashi¹, Yan Wu¹, Yoshihiro Takahashi¹ (1.Nihon Univ.)

Keywords:anodic oxidation, high pressure ateam, SiO2 films

The process current during anodic oxidation in high pressure steam was investigated. An abnormally large current was measured under high steam pressure and also high applied voltage conditions. It was confirmed that worse electric properties were observed from the oxide film fabricated by the process with the abnormally current.