Effects of chemical cleaning with HCl Solution on Al<sub>2</sub>O<sub>3</sub>/GaN interface properties

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Tue. Mar 16, 2021 9:00 AM - 12:15 PM Z13 (Z13)

Shinichi Takagi(Univ. of Tokyo)

9:15 AM - 9:30 AM

〇(M1)Taisei Nagai¹, Noriyuki Taoka¹, Akio Ohta¹, Mitsuhisa Ikeda¹, Katsunori Makihara¹, Seiichi Miyazaki¹ (1.Nagoya Univ.)

Keywords:interface properties