Study of improvement of GeO<sub>2</sub> film quality and GeO<sub>2</sub>/Ge interface state by pure water rinse after PMA

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Tue. Mar 16, 2021 9:00 AM - 12:15 PM Z13 (Z13)

Shinichi Takagi(Univ. of Tokyo)

9:30 AM - 9:45 AM

〇(M1)Hirotaka Iino¹, Haruka Horiguchi¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Noukou univ.)

Keywords:germanium, semiconductor