Study on improvement of GeO<sub>2</sub> film quality by plasma nitriding

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Tue. Mar 16, 2021 9:00 AM - 12:15 PM Z13 (Z13)

Shinichi Takagi(Univ. of Tokyo)

9:45 AM - 10:00 AM

〇(M1)Keisuke Ito¹, Hiroki Takahashi¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Noukou univ.)

Keywords:germanium, semiconductor