[16a-Z23-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

[16a-Z23-1] Investigation of the effect of substrate temperature on the characteristics of
BaSi₂ films on glass substrates formed by RF sputtering

〇Ryota Koitabashi¹, Taira Nemoto¹, Masami Mesuda², Kaoru Toko¹, Takashi Suemasu¹ (1.Univ. Tsukuba, 2.Tosoh Corporation)

Keywords:BaSi2, sputtering, silicide semiconductor