Ryota Koitabashi

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 9:00 AM - 12:00 PM Z23 (Z23)

Oral presentation
| 13 Semiconductors
| 13.2 Exploratory Materials, Physical Properties, Devices

[16a-Z23-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

9:00 AM - 9:15 AM

[16a-Z23-1] Investigation of the effect of substrate temperature on the characteristics of
BaSi₂ films on glass substrates formed by RF sputtering

〇Ryota Koitabashi¹, Taira Nemoto¹, Masami Mesuda², Kaoru Toko¹, Takashi Suemasu¹ (1.Univ. Tsukuba, 2.Tosoh Corporation)