The 68th JSAP Spring Meeting 2021

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13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[16a-Z23-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

Tue. Mar 16, 2021 9:00 AM - 12:00 PM Z23 (Z23)

Haruhiko Udono(Ibaraki Univ.), Kenji Yamaguchi(QST)

9:15 AM - 9:30 AM

[16a-Z23-2] Characterizations of B-doped BaSi2 films formed by sputtering

〇Hayato Hasebe1, Taira Nemoto1, Ryota Koitabashi1, Masami Mesuda2, Kaoru Toko1, Takashi Suemasu1 (1.Univ. Tsukuba, 2.Tosoh Corporation)

Keywords:BaSi2, sputtering