The 68th JSAP Spring Meeting 2021

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CS Code-sharing session » 【CS.1】 Code-sharing Session of 2.4 & 7.5

[16a-Z34-1~11] CS.1 Code-sharing Session of 2.4 & 7.5

Tue. Mar 16, 2021 9:00 AM - 12:00 PM Z34 (Z34)

Noriaki Toyoda(Univ. of Hyogo), Satoshi Ninomiya(Univ. of Yamanashi)

9:15 AM - 9:30 AM

△ [16a-Z34-2] Temperature dependance of surface modification of Ni by neutral cluster irradiation

〇(M1)Takaki Ota1, Noriaki Toyoda1 (1.Univ. of Hyogo)

Keywords:cluster beam, atomic layer etching