[16a-Z34-1~11] CS.1 Code-sharing Session of 2.4 & 7.5

[16a-Z34-5] Simulation of low energy ion beam using beam plasma model

〇Taro Hayakawa¹, Yutaka Inouchi¹, Tadashi Ikejiri¹ (1.Nissin Ion Equipment)

Keywords:ion beam, space charge, ion source

Simulation of extraction of a low-energy ion beam sometimes give results of more divergent beams than that of experimental results.
This is because the effect of compensation of the positive space charge by the electrons is not taken into consideration.
Since we created a simulation model that considers the effect of electrons compensating for the space charge of the beam, we will describe this result.