[16p-P03-1~1] 15.7 Crystal characterization, impurities and crystal defects

[16p-P03-1] Defect Analyses Using TEM of a-In₂O₃ Grown by Mist CVD on a-Al₂O₃ Substrate

〇Yuka Hayakawa¹, Soichiro Ohno¹, Tomohiro Yamaguchi¹, Takanori Kiguchi², Subaru Takahashi¹, Yokoo Hirokazu¹, Takeyoshi Onuma¹, Tohru Honda¹ (1.Kogakuin Univ., 2.Tohoku Univ.)

Keywords:transmission electron microscope, Mist chemical vapor deposition, In2O3