5:00 PM - 5:50 PM
[16p-P13-1] Performance of CLC poly-Si1-xGex TFTs on glass substrates
Keywords:TFT, Si, Ge
Poster presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Tue. Mar 16, 2021 5:00 PM - 5:50 PM P13 (Poster)
5:00 PM - 5:50 PM
Keywords:TFT, Si, Ge