[16p-Z10-1~17] 3.15 Silicon photonics and integrated photonics

[16p-Z10-7] Investigation of monolithic integration of hybrid MOS optical phase shifter and photodetector

〇Shuhei Ohno¹, Stephane Monfray², Frederic Boeuf², Kasidit Toprasertpong¹, Shinichi Takagi¹, Mitsuru Takenaka¹ (1.The Univ. of Tokyo, 2.STMicroelectronics)

Keywords:Si photonics, hybrid MOS optical phase shfiter, photodetector

Optical neural network (ONN) based on Si programmable photonic integrated circuit (PIC) attracts a lot of attention and we have proposed Si programmable PIC using ultra-power-efficient III-V/Si hybrid metal-oxide-semiconductor (MOS) optical phase shifter for ONN. Here, we demonstrate monorithic integration of the hybrid MOS optical phase shfiter and an InGaAs photodetector for high-functional Si programmable PIC.