The 68th JSAP Spring Meeting 2021

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Oral presentation

8 Plasma Electronics » 8.8 Division of Plasma Electronics 30th Anniversary Special Session

[16p-Z12-1~17] 8.8 Division of Plasma Electronics 30th Anniversary Special Session

Tue. Mar 16, 2021 1:00 PM - 7:45 PM Z12 (Z12)

Haruaki Akashi(National Defence Academy), Makoto Matsui(Shizuoka Univ.), Hiroshi Kuwahata(Tokai Univ.), Yoshihiro Umezawa(東京エレクトロン宮城)

5:00 PM - 5:15 PM

[16p-Z12-8] Control of a-C:H Film Properties by Tailored Waveform Excited PECVD

〇(M2)Ryosuke Iwamoto1, Kunihiro Kamataki1, Naho Itagaki1, Kazunori Koga1,2, Masaharu Shiratani1, Takahiro Shindo3, Satoshi Tanaka3, Tatsuo Matsudo3 (1.Kyushu Univ., 2.NINS, 3.TEL)

Keywords:PECVD, Tailored Waveform Excitation, hydrogenated amorphous carbon (a-C:H)