The 68th JSAP Spring Meeting 2021

Presentation information

Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[16p-Z25-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

Tue. Mar 16, 2021 1:30 PM - 4:15 PM Z25 (Z25)

Nobuya Mori(Osaka Univ.), Takashi Hasunuma(Univ. of Tsukuba)

3:00 PM - 3:15 PM

[16p-Z25-6] TCAD simulation of acoustic and optical phonon transport in MOSFETs

Junichi Hattori1, Tsutomu Ikegami1, Koichi Fukuda1 (1.AIST)

Keywords:thermal transport, phonon, TCAD