[16p-Z26-1~15] CS.5 6.1 強誘電体薄膜、13.3 絶縁膜技術、13.5 デバイス／配線／集積化技術のコードシェアセッション

▼ [16p-Z26-7] Direct Evidence of Electric Field driven Phase Transformation in the Waking-up Process of Ferroelectric HfO₂ Characterized by Conventional X-ray Diffraction

〇(D)Siri Nittayakasetwat¹、Koji Kita¹ (1.Univ. of Tokyo)

キーワード：HfO2, waking-up, ferroelectric

One of the remaining issues of ferroelectric (FE) HfO₂ technologies is the waking-up effect. This effect has been observed in ferroelectric HfO₂ with various dopants, and it is considered to be the result of the phase transformation, driven by an electric field, to increase the amount of the orthorhombic phase. The change in the lattice structure has been locally observed by TEM and a synchrotron XRD on a microscopically small area under the top electrode. In this study, we would like to provide direct evidence of the phase transformation driven by voltage cycling in FE-HfO₂ thin films using conventional XRD techniques.