Evaluation of Interface Defect Properties of PtO<sub>x</sub>/ZnO Schottky contacts by using Deep Level Transient Spectroscopy

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

Tue. Mar 16, 2021 1:30 PM - 5:15 PM Z33 (Z33)

Hiromichi Ohta(Hokkaido Univ.)

2:00 PM - 2:15 PM

〇(M1)Mikiya Matsumura¹, Takahisa Tanaka¹, Ken Uchida¹ (1.Univ. Tokyo)

Keywords:DLTS, ZnO, crystal defect

Interface defect properties of PtO_x/ZnO Schottky contacts was evaluated by using Deep Level Transient Spectroscopy.