[17a-P09-1~7] 12.7 Biomedical Engineering and Biochips

▲ [17a-P09-4] Effect of Gap Separation on Performance of Nanogap Electrode-based Oxygen Sensor

〇Tue Trong Phan¹, Yexiao Sun¹, Yutaka Majima¹ (1.Tokyo Institute of Technology)

Keywords:nanogap electrodes, oxygen sensor, cerium oxide

Development of a simple, low-cost, and high-performance oxygen gas sensor is highly desired for many areas such as environment and transportation. In this regard, nanogap electrode-based gas sensor is a promising candidate to become the next-generation device because of its high sensitivity, fast, low power consumption, and portability. Previously, we have developed robust Pt-based nanogap electrodes with 10 nm scale in the gap separation by electron beam lithography (EBL), and demonstrated response improvement of nanogap electrode-based oxygen gas sensor as compared with the microgap counterpart [3]. In this study, we investigate the gap separation dependence and discuss the impact on oxygen sensing performance of nanogap gas sensor.