Precursor modulation effects on solid-phase crystallization of Group Ⅳ semiconductor alloy thin films

Presentation information

Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

Wed. Mar 17, 2021 10:00 AM - 12:00 PM Z33 (Z33)

Keisuke Arimoto(Univ. of Yamanashi)

11:00 AM - 11:15 AM

〇Takuto Mizoguchi¹, Toshifumi Imajo¹, Takashi Suemasu¹, Kaoru Toko¹ (1.Tsukuba Univ.)

Keywords:SiGeSn, solid-phase crystallization, thin film