[17p-P02-1~8] 3.13 Semiconductor optical devices

[17p-P02-7] Calculating Diffraction Loss Maps for a Gain-Guided Optical Micro-Cavity

〇Chikako Kurokawa¹, Yuta Suzuki¹, Yuma Kitagawa¹, Shin-ichiro Tezuka¹ (1.Yokogawa Electric Corp.)

Keywords:MEMS-VCSEL, Fox-Li method, gain-guided optical microcavity

It is essential to estimate the structural and manufacturing tolerance to reduce diffraction losses by misalignment and inclination of the mirrors for optimizing MEMS-VCSEL, which has an optical gain-guided micro-cavity formed by tunnel junction (TJ). We calculated the diffraction loss maps for the MEMS-VCSEL using Fox–Li method with non-paraxial approximation and gain-guided mechanism approximation by the optical aperture. In the results, by increasing the TJ diameter, the position of the beam center shifts due to the inclination of the mirror was compensated with the misalignment of the mirror.