[17p-P09-1~11] 12.1 Fabrications and Structure Controls

[17p-P09-2] Effect of Polymerization on the Characteristics of Silsesquioxane Thin Films

〇Yamato Ogawa¹, Hiroaki Usui¹ (1.Tokyo University of Agriculture and Technology Graduated School)

Keywords:vapor deposition

Polyoctahedral silsesquioxane (POSS) is an organic-inorganic hybrid material that combines organic and inorganic compounds at the molecular level, and has the characteristics of organic materials, such as flexibility and solubility, and inorganic materials, such as heat resistance and hardness. In this study, the acrylic monomer iBuPOSSMA shown in Fig. 1 was deposited and thin films were prepared. The polymerization of iBuPOSSMA by electron irradiation during film formation was attempted, and the effect of polymerization on the film properties was investigated.