[17p-Z03-1~10] Next Giant Leap with Plasma Electronics in New Normal Era

[17p-Z03-7] Past and future of plasma processes

〇Tetsuya Tatsumi¹ (1.Sony Semiconductor Solutions Corp.)

Keywords:semiconductor, plasma, dry etching

I will review the history of the development of dry etching technology and its application to semiconductor devices, and discuss the direction of the future evolution of semiconductor technology and the expectations for plasma processes in the future.