[17p-Z05-1~7] Research progress on laser induced periodic surface structure

[17p-Z05-3] Optical Observation of the Growing Process of Laser-induced Periodic Surface Structures

〇Shigeki Matsuo¹ (1.Shibaura Inst. Tech.)

Keywords:LIPSS, ripple, optical observation

The formation of laser-induced periodic surface structures (LIPSS) is affected by surface topology such as the scratches, thus the formation process varies from case to case. In order to observe such a process, and obtain a large amount of data, we attempted to observe it optically. As one of the methods to enable optical observation of LIPSS, which have fine stripe patterns, a setup with oblique incidence setup was applied, and obtained LIPSS with period long enough for optical observation. We constructed a system to acquire images synchronized with the laser pulse, and observed the formation process.