2021年第68回応用物理学会春季学術講演会

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シンポジウム(口頭講演)

シンポジウム » グラフェン研究の進展と今後の展望~ノーベル物理学賞受賞から10年~

[17p-Z12-1~12] グラフェン研究の進展と今後の展望~ノーベル物理学賞受賞から10年~

2021年3月17日(水) 13:30 〜 18:30 Z12 (Z12)

神田 晶申(筑波大)、守谷 頼(東大)

16:30 〜 16:45

[17p-Z12-8] Growth of hexagonal boron nitride/graphene bilayer heterostructure via epitaxial intercalation

SHENGNAN WANG1、Jack Crowther1、Hiroyuki Kageshima2、Hiroki Hibino1,3、Yoshitaka Taniyasu1 (1.NTT Basic Research Labs、2.Shimane Univ.、3.Kwansei Gakuin Univ.)

キーワード:graphene, hBN, heterostructure

Moiré engineering has emerged as an attractive technology to tailor the physical properties of stacked van der Waals (vdW) materials where quantum control can take place. To extend the diversity of fundamental research and make progress towards practical applications, the development of a reliable and high-throughput synthesis approach for such stacked layers with desired interlayer angles is indispensable.
We previously reported the chemical vapor deposition (CVD) growth of uniform hexagonal boron nitride (hBN) film with high quality. Here, we first grow the hBN as a top layer template, then epitaxially grow graphene underneath the hBN template, thereby achieving the growth of hBN/graphene bilayer heterostructures. The epitaxial intercalation of graphene under the hBN leads to convergent interlayer angles of less than 0.5o.