[17p-Z13-1~8] 1.6 Ultrasonics

[17p-Z13-3] Deposition and Evaluation of Ta₂O₅ Piezoelectric Thin Film on Pt Crystal Film

〇(B)Keisuke Matsuura¹, Masashi Suzuki¹, Shoji Kakio¹, Masanori Kodera², Hiroshi Funakubo² (1.Univ. of Yamanashi, 2.Tokyo Tech)

Keywords:Ta2O5, Epitaxial growth, SAW

Piezoelectric Ta₂O₅ thin films were deposited on Pt/Si substrates using an RF magnetron sputtering system, and the SAW and BAW properties for their orientation were evaluated. From XRD, peaks that do not appear in the films deposited on Si were observed in the films deposited on Pt/Si, suggesting epitaxial growth of Ta₂O₅ thin film due to Pt lattice plane. However, the electromechanical coupling coefficient obtained from the HBAR response of this sample was smaller than that of the sample without Pt sensing.