11:45 AM - 11:55 AM
[18a-Z01-9] Development of etching system for latest semiconductor manufacturing process
Keywords:semiconductor, etch
Presentation information
Symposium (Oral)
Symposium » [Open Symposium] Semiconductors Essential to Accelerating DX Technology in "With Corona" Era
[18a-Z01-1~11] [Open Symposium] Semiconductors Essential to Accelerating DX Technology in "With Corona" Era
Thu. Mar 18, 2021 9:50 AM - 12:10 PM Z01 (Z01)
Emi TAMECHIKA(Yokohama National University)