[18a-Z02-1~6] New development of power generation material research for IoT promoting DX in the new normal era

[18a-Z02-5] Silicon Oxide Electret for MEMS Vibrational Energy Harvester

〇Hiroshi Toshiyoshi¹, Gen Hashiguchi² (1.Univ. of Tokyo, 2.Shizuoka Univ.)

Keywords:MEMS, vibrational energy harvester, energy harvester

Silicon oxide can be turned into permanently charged material or so-called “electret” by applying a high voltage (100 ~ 500 V) at a high temperature (~ 500 deg C) at the end of MEMS micromachining process. We applied electret-polarization technique to comb-like electrodes to produce a MEMS vibrational energy harvester.