The 68th JSAP Spring Meeting 2021

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3 Optics and Photonics » 3.7 Laser processing

[18a-Z04-1~11] 3.7 Laser processing

Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z04 (Z04)

Daisuke Nakamura(Kyushu Univ.), Yuji Sato(Osaka Univ.)

9:30 AM - 9:45 AM

△ [18a-Z04-3] The pulse duration dependence of laser ablation crater on Si

〇(M1)Kazuki Mimura1, Takashi Takahashi2, Makoto Yamaguchi3, Yohei Kobayashi2, Takuro Tomita1 (1.Tokushima Univ., 2.Univ. of Tokyo, 3.Akita Univ.)

Keywords:Laser ablation, Pulse duration dependence, silicon