The 68th JSAP Spring Meeting 2021

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[18a-Z13-1~11] 6.2 Carbon-based thin films

Thu. Mar 18, 2021 9:30 AM - 12:30 PM Z13 (Z13)

Takayuki Iwasaki(Tokyo Tech), Norio Tokuda(Kanazawa Univ.)

9:30 AM - 9:45 AM

[18a-Z13-1] Near surface impurity distributions of B-ion implanted diamond after high pressure and high temperature treatment

〇Kento Higashiura1, Daiki Toriu1, Rei Fukuta1, Fumitaro Isikawa1, Toru Shinmei2, Hiroaki Ohfuji2, Tetsuo Irifune2 (1.Ehime Univ., 2.Ehime Univ. GRC)

Keywords:semiconductor, diamond