The 68th JSAP Spring Meeting 2021

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[18a-Z13-1~11] 6.2 Carbon-based thin films

Thu. Mar 18, 2021 9:30 AM - 12:30 PM Z13 (Z13)

Takayuki Iwasaki(Tokyo Tech), Norio Tokuda(Kanazawa Univ.)

9:45 AM - 10:00 AM

[18a-Z13-2] Formation of low compensation p-type conductive layers in the CVD diamond films accomplished by B ion implantation

〇Yuhei Seki1, Sou Kawasaki1, Yasushi Hoshino1, Jyoji Nakata1 (1.Kanagawa Univ.)

Keywords:Ion implantation, CVD Diamond film, Electrical property measurement