[18a-Z13-1~11] 6.2 カーボン系薄膜

▲ [18a-Z13-7] Observation of Nitrogen species at Al₂O₃/NO₂/H-diamond Interfaces Using Synchrotron X-ray Photoemission Spectroscopy

〇Niloy Chandra Saha¹、Kazutoshi Takahashi²、Masaki Imamura²、Makoto Kasu¹ (1.Dep. Electrical Electronic Eng., Saga Univ.、2.Synchrotron Light Application Center, Saga Univ.)

キーワード：Synchrotron XPS, Diamond, NO2 doping

H-diamond exhibits negative electron affinity and the exposure of H-diamond to 2% NO₂ increases the hole sheet concentration. However, whether nitrogen (N) species exist on the NO₂/H-diamond surface or the interface and how the decomposed NO₂ molecule works as an acceptor on the H-diamond surface remained controversial. Two N peaks corresponding to C-NH₂ (399.43 eV) and NO₃^- (407.45 eV) were confirmed at the Al₂O₃/NO₂/(001)H-diamond interface. C-NH₂ and NO₃^- originated from the decomposition of NO₂ and N₂O₄, respectively, at the interface after accepting electron diamond.