[18a-Z17-1~11] 8.2 プラズマ成膜・エッチング・表面処理

▲ [18a-Z17-5] High-speed Deposition of Graphite-like Carbon Film by Microwave Surface-Wave Plasma

〇Hansin BAE¹、Kazuya Hikita¹、Haruka Suzuki^1,2、Kensuke Sasai²、Hirotaka Toyoda^1,2,3 (1.Nagoya Univ.、2.cLPS、3.NIFS)

キーワード：PECVD, Graphite-like Carbon, Microwave Suface-wave Plasma