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[18a-Z33-1] Transformation from degenerate to non-degenerate Sn-doped In2O3 films by postirradaition of O- ions
Keywords:Indium oxide, post-irradiation of negatively-charged oxygen ions, optical properties
Sn-doped In2O3 (ITO) is mainly applied to transparent conducting oxides. In this study, we successfully demonstrated that the carrier concentration of ITO filmes irradiated by negatively-charged oxygen ions became very low, where it showed non-degenerate semiconducting properties which are quite different from those of non-irradiated ITO ones.