[18a-Z33-1~9] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18a-Z33-2] New evaluation of degenerate/non-degenerate states and novel bandagp engineering of Sn-doped In₂O₃ films by postirradaition of O^- ions

〇Yutaka Furubayashi¹, Makoto Maehara², Toshiyuki Sakemi², Hisashi Kitami^1,2, Tetsuya Yamamoto¹ (1.Kochi Univ. Tech., 2.Sumitomo Heavy Ind., ltd.)

Keywords:indium oxide, degenerate/non-degenerate semiconducting states, optical bandgap engineering

Recently we have succeeded the great modification of electrical and optical properties of Sn-doped In₂O₃ (ITO) films by a postirradiation of negatively-charged oxygen ions. In this presentation, we will propose novel methods for: (1) evaluation of degenerate/non-degenerate semiconducting states. (2) optical bandgap engineering.