2:30 PM - 2:35 PM
[18p-Z03-1] Opening Remarks
Keywords:soft x-ray imaging
Presentation information
Symposium (Oral)
Symposium » Progresses and future on EUV and soft x-ray imaging techniques
[18p-Z03-1~10] Progresses and future on EUV and soft x-ray imaging techniques
Thu. Mar 18, 2021 2:30 PM - 6:35 PM Z03 (Z03)
Mitsunori Toyoda(Tokyo Polytechnic Univ.), Toshihide Tsuru(Yamagata Univ.), Tetsuo Harada(Univ. of Hyogo), Ohigashi Takuji(IMS)