[18p-Z13-1~12] 6.2 Carbon-based thin films

△ [18p-Z13-3] Fabrication of 2D High-Density NV Ensemble Using Vacancies Created by a Transmission Electron Microscope

〇(B)Kyosuke Hayasaka¹, Kyotaro Kanehisa¹, Tetsuya Tatsuishi¹, Yuta Saito¹, Takashi Tanii¹, Shinobu Onoda², Junichi Isoya³, Shinpei Enomoto⁴, Shozo Kono⁴, Hiroshi Kawarada^1,4 (1.Waseda Univ., 2.QST, 3.Univ. of Tsukuba, 4.ZAIKEN)

Keywords:NV center, diamond, semiconductor

The NV ensemble in diamond is expected to be applied to magnetic sensors. In particular, when the two-dimensional NV centers form an entangled state, it is predicted that the magnetic sensitivity of the magnetic sensor will be improved. It is necessary to prepare a high-concentration NV ensemble to form an entangled state. For a two-dimensional NV ensemble, we attempted to improve the surface density of the NV center by irradiating with electron beams using a transmission electron microscope. With or without electron irradiation, the NV area density improved from 2.9 x 10⁹[cm²] to a maximum of 3.0 x 10¹¹[cm²].