[18p-Z14-1~4] 7.1 X-ray technologies

[18p-Z14-2] Fabrication and evaluation of a soft X-ray laminar-type diffraction grating of 3200 lines/mm groove density

〇Tadashi Hatano^1,2, Masato Koike^3,4, Alexander S. Pirozhkov³, Tsubasa Kakio⁵, Nobukazu Hayashi⁵, Hiroyuki Sasai⁵, Tetsuya Nagano⁵, Masami Terauchi² (1.SRIS, Tohoku Univ., 2.IMRAM, Tohoku Univ., 3.QuBS, QST, 4.Eng., Osaka City Univ., 5.Device Dept., Shimadzu Corp.)

Keywords:diffraction grating, soft X-ray, diffraction efficiency

A laminar-type soft X-ray diffraction grating of high groove density of 3200 lines/mm was fabricated. The design target was 700 eV at an angle of incidence of 86°. After Au coating, the diffraction efficiency was measured in 0.5–1.2 keV and 1.1–1.6 keV regions at angles of incidence of 86° and 88°, respectively. The results agreed with numerical calculation assuming the roughness of the substrate surface, 0.6 nm rms, which means the fabrication of the diffraction grating was successful. Variation of the substrate quality, material of coating, groove depth, or duty ratio could be possible.