Tadashi Hatano

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:15 PM - 2:15 PM Z14 (Z14)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[18p-Z14-1~4] 7.1 X-ray technologies

1:30 PM - 1:45 PM

[18p-Z14-2] Fabrication and evaluation of a soft X-ray laminar-type diffraction grating of 3200 lines/mm groove density

〇Tadashi Hatano^1,2, Masato Koike^3,4, Alexander S. Pirozhkov³, Tsubasa Kakio⁵, Nobukazu Hayashi⁵, Hiroyuki Sasai⁵, Tetsuya Nagano⁵, Masami Terauchi² (1.SRIS, Tohoku Univ., 2.IMRAM, Tohoku Univ., 3.QuBS, QST, 4.Eng., Osaka City Univ., 5.Device Dept., Shimadzu Corp.)

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