4:15 PM - 4:30 PM
[18p-Z17-11] Wide-Area Ashing Treatment by Pulsed Microwave Atmospheric Pressure Ar/O2 Plasma
Keywords:atmospheric pressure plasma
Oral presentation
8 Plasma Electronics » 8.1 Plasma production and diagnostics
Thu. Mar 18, 2021 1:30 PM - 7:00 PM Z17 (Z17)
Hiroshi Akatsuka(Tokyo Tech), Kentaro Tomita(Hokkaido Univ.), Manabu Tanaka(Kyushu Univ.)
4:15 PM - 4:30 PM
Keywords:atmospheric pressure plasma