Tomohiro Ogasawara

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:30 PM - 7:00 PM Z17 (Z17)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[18p-Z17-1~20] 8.1 Plasma production and diagnostics

4:15 PM - 4:30 PM

[18p-Z17-11] Wide-Area Ashing Treatment by Pulsed Microwave Atmospheric Pressure Ar/O₂ Plasma

〇(M1)Tomohiro Ogasawara¹, Yuki Iwata¹, Haruka Suzuki¹, Hirotaka Toyoda^1,2 (1.Nagoya Univ., 2.NIFS)