Crystallization of SiN Capped InSb Films on Glass by RTA

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Mar 18, 2021 1:30 PM - 5:15 PM Z24 (Z24)

Seiichiro Higashi(Hiroshima Univ.), Tatsuya Okada(Univ. of the Ryukyus)

3:30 PM - 3:45 PM

〇Genta Sakamoto¹, Asuka Shimabukuro¹, Takashi Noguichi¹, Tatsuya Okada¹ (1.Univ. Ryukyus)

Keywords:InSb, RTA, Crystallization