Poster presentation
[16p-P13-1~2] 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Tue. Mar 16, 2021 5:00 PM - 5:50 PM P13 (Poster)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
5:00 PM - 5:50 PM
〇Akito Hara1, Kuninori Kitahara2 (1.Tohoku Gakuin Univ., 2.Shimane Univ.)
5:00 PM - 5:50 PM
〇(B)Kohei Hayama1, Kosuke Kawashima1, Muneoki Sawada1, Kentarou Tamura1, Daisuke Yamane1,2 (1.Ritsumeikan Univ., 2.JST PRESTO)