The 68th JSAP Spring Meeting 2021

Sessions

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Poster presentation

[16p-P13-1~2] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tue. Mar 16, 2021 5:00 PM - 5:50 PM P13 (Poster)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

Oral presentation

[18p-Z24-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Mar 18, 2021 1:30 PM - 5:15 PM Z24 (Z24)

Seiichiro Higashi(Hiroshima Univ.), Tatsuya Okada(Univ. of the Ryukyus)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

Oral presentation

[19a-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Mar 19, 2021 9:00 AM - 11:45 AM Z24 (Z24)

Hitoshi Habuka(Yokohama Natl. Univ.), Yan Wu(Nihon Univ.)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

Oral presentation

[19p-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Mar 19, 2021 1:30 PM - 4:15 PM Z24 (Z24)

Kuniyuki Kakushima(Tokyo Tech), Masato Sone(Tokyo Tech)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

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