The 68th JSAP Spring Meeting 2021

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13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Mar 19, 2021 9:00 AM - 11:45 AM Z24 (Z24)

Hitoshi Habuka(Yokohama Natl. Univ.), Yan Wu(Nihon Univ.)

9:30 AM - 9:45 AM

[19a-Z24-3] Deposition of AlN thin film using minimal RF-sputtering machine

〇Masaya Hotta1, Hiroshi Nishizato1, Haruki Toonoe2, Ikunari Shiba2, Takuya Maeda3, Yuki Odo3, Satoshi Fujii3 (1.HORIBA STEC, 2.YOKOGAWA S.S., 3.N.I.T. Okinawa call.)

Keywords:minimalfab, sputtering, aluminum nitride